I. Process Cooling Water System (PCW)
The PCW system mainly provides constant temperature cooling water for process equipment to cool the process equipment.
II. Process Exhaust System
Process exhaust is the core of plant safety, containing acid and alkaline gases, organic solvents, dust, moisture, high-temperature exhaust gases, with significant differences in corrosiveness and flammability. Material selection focuses oncorrosion resistance and high-temperature resistance.
(1) Acid Exhaust and Alkaline Exhaust System
Duct:PP ducts (UV resistant for outdoor installation) or Teflon stainless steel ducts, or fiberglass for high-temperature conditions. Air valve: PP air valve (UV resistant for outdoor installation) or Teflon stainless steel air valve. Pressure gauge: Stainless steel 316 air pressure gauge. Connection form with process equipment:: Generally flange connection.
(2) Organic Exhaust System
The main media contain organics such as IPA, acetone, and photoresist volatiles, which are flammable and explosive, focusing on anti-static and resistance to organic solvents.
Duct:304 stainless steel, must be anti-static grounded. Air valve: Stainless steel 304 handle air valve. Pressure gauge: Stainless steel pressure gauge.
Connection form with process equipment:: Generally flange connection.
(3) General Exhaust System (No Moisture)
Mainly for drying exhaust gases, with no strong corrosion, the medium is tail gas from equipment.
Duct:Galvanized steel pipe, small diameter may use PVC pipe. Air valve: Steel. Pressure gauge: Stainless steel pressure gauge. Connection form with process equipment:: Generally flange connection, some directly use soft pipe with steel ring for connection.
(4) Exhaust System with Moisture (With Water)
Mainly exhaust gases containing water vapor, condensate, prone to condensation and corrosion.
Duct: 304 stainless steel. Air valve: Stainless steel air valve. Pressure gauge: Stainless steel pressure gauge. Connection form with process equipment: Generally flange connection.
(5) Exhaust System with Dust
Mainly contains particulate dust, glass fragments, polishing dust, prone to abrasion and clogging of pipelines.
Duct: Thickened galvanized steel pipe, wear-resistant PP or 304 stainless steel. Air valve: Carbon steel air valve, stainless steel air valve. Pressure gauge:Stainless steel dust-proof pressure gauge with filter screen installed at the front end. Connection form with process equipment: Generally flange connection
III. Ultrapure Water System (UPW)
Ultrapure water is mainly used for wafer cleaning, panel developing, etching cleaning, with extremely high resistivity, strictly prohibiting metal ion precipitation, requiring high cleanliness levels.
Pipeline material: Generally use Clean-PVC, for higher requirements, use stainless steel 316L EP pipes.
Valves: Clean-PVC, stainless steel 316.
Connection form with process equipment: Flange connection
IV. Compressed Air (CDA) System
Mainly used as instrument air, equipment power air, requiring dryness, cleanliness, and oil-free.
Pipeline: 304L BA stainless steel pipe.
Valves: Small specifications (≤3/4 inch) use stainless steel ferrule ball valves, >3/4 inch use three-piece welded ball valves.
Pressure gauge: Stainless steel pressure gauge, back axial connection, ferrule connection, range 0–1.0MPa.
Connection form with process equipment: Flange connection, ferrule connection.
V. Vacuum (PV) System
Mainly provides a negative pressure environment for the process chamber, requiring extremely high pipeline sealing to prevent air leakage.
Pipeline: UPVC SCH80.
Valves: UPVC SCH80 ball valves.
Pressure gauge: Stainless steel vacuum pressure gauge.
Connection form with process equipment: Flange connection, ferrule connection (but need to add adapter and connect with stainless steel pipe before connecting with equipment ferrule).
VI. General Nitrogen (GN2)
Mainly used for purge gas, protective gas, inert gas, with conventional cleanliness level.
Pipeline: 304L BA stainless steel pipe.
Valves: Stainless steel handle ball valves.
Pressure gauge: Stainless steel pressure gauge.
Connection form with process equipment: Stainless steel ferrule connection, flange interception.
VII. Medium Temperature Water System
Mainly used for cooling high-temperature equipment.
Pipeline: 304 stainless steel AP pipe.
Valves: Stainless steel ball valves.
Pressure gauge: Stainless steel shock-resistant pressure gauge.
Connection form with process equipment:Flange connection, threaded connection.
VIII. Waste Liquid and Wastewater Drainage System
Includes acidic and alkaline waste liquid, cleaning wastewater, general drainage, with complex media and large differences in corrosiveness, secondary distribution mostly gravity and pressure discharge.
Pipeline: Acidic and alkaline waste liquid use PVDF, PPH, stainless steel 304; general drainage use UPVC SCH80.
Connection form with process equipment:Flange connection, threaded connection
IX. High Purity Gas System (PHe, PO₂, PAr, PN₂, etc.)
High purity process gases are used for coating, doping, etching, requiring ppb level purity, making it the most demanding system for secondary distribution (excluding special gases).
Pipeline: 316L EP ultra-pure stainless steel pipe, electrolytic polished inner wall Ra≤0.2μm, seamless clean pipe.
Valves: High purity diaphragm valves, bellows-sealed ball valves, zero leakage, no dead angles.
Pressure gauge: High purity diaphragm pressure gauge, prohibiting ordinary pressure gauges.
Fittings: VCR high purity fittings, automatic orbital welding fittings, dust-free construction throughout, helium leak detection.
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